DELTAS
Deep Learning for Inverse Lithography and SEM Inspection
A collaboration between ASML B.V. and the Signal Processing Systems group, focusing on deep generative models for lithography and metrology. The project is headed by dr. Ruud van Sloun (TU/e) and dr. Alexandru Onose (ASML), and executed by Esther van Pelt. Dr. Harm Belt (TU/e + ASML) and dr. Wouter Kouw (TU/e) assist in supervision.
Esther van Pelt
PhD student
I am a PhD student at EE/BIASlab, working together with ASML to apply generative modeling solutions in the semiconductor industry.
Wouter Kouw
Assistant professor
I am an assistant professor working on active inference for mobile robots.